Nanotechnology at Fraunhofer - Competences - Competences ENAS

Competences ENAS (overview)

Fraunhofer Nanotechnology Alliance

Core competences of Fraunhofer Institute for Electronic Nano Systems ENAS

Nano technologies for sensors and actuators containing: Nano structures and nano effects for wafer level packaging CNT based sensors Sensors based on nanocomposites Nano imprinting and micro structure molding

Technologies and simulation for micro and nano electronics containing: Metallization, low-k and ultralow-k dielectrics Air gaps for low parasitic capacitances in nano interconnect systems Process and equipment simulation

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